Wang Hai, Li Han, Zhou Xuan, Wang Zhan, Wen Li. SF6 plasma etching and profile evolution of silicon in microplasma reactor. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1210-1213, IEEE, 2013. [doi]
Abstract is missing.