Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams

Darcy T. Haluzan, David M. Klymyshyn, Sven Achenbach, Martin Börner. Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams. Micromachines, 1(2):68-81, 2010. [doi]

@article{HaluzanKAB10,
  title = {Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams},
  author = {Darcy T. Haluzan and David M. Klymyshyn and Sven Achenbach and Martin Börner},
  year = {2010},
  doi = {10.3390/mi1020068},
  url = {http://dx.doi.org/10.3390/mi1020068},
  researchr = {https://researchr.org/publication/HaluzanKAB10},
  cites = {0},
  citedby = {0},
  journal = {Micromachines},
  volume = {1},
  number = {2},
  pages = {68-81},
}