Satoshi Hamaguchi. Modeling and simulation methods for plasma processing. IBM Journal of Research and Development, 43(1):199-216, 1999. [doi]
@article{Hamaguchi99,
title = {Modeling and simulation methods for plasma processing},
author = {Satoshi Hamaguchi},
year = {1999},
doi = {10.1147/rd.431.0199},
url = {http://dx.doi.org/10.1147/rd.431.0199},
tags = {modeling, process modeling},
researchr = {https://researchr.org/publication/Hamaguchi99},
cites = {0},
citedby = {0},
journal = {IBM Journal of Research and Development},
volume = {43},
number = {1},
pages = {199-216},
}