Two-way material transportation method based on 300mm wafer FAB line simulation

Youngshin Han, Chilgee Lee. Two-way material transportation method based on 300mm wafer FAB line simulation. In Robert M. McGraw, Eric S. Imsand, Michael J. Chinni, editors, Proceedings of the 2010 Spring Simulation Multiconference, SpringSim 2010, Orlando, Florida, USA, April 11-15, 2010. pages 227, SCS/ACM, 2010. [doi]

Abstract

Abstract is missing.