Deep Learning-Based Virtual Metrology in Multivariate Time Series

Siho Han, Jihwan Min, Jui Ma, Gyuil Hwang, Taeyeong Heo, Young Eun Kim, Sungjin Kang, Hyojun Kim, Sangjong Park, Kisuk Sung. Deep Learning-Based Virtual Metrology in Multivariate Time Series. In IEEE International Conference on Prognostics and Health Management, ICPHM 2023, Montreal, QC, Canada, June 5-7, 2023. pages 30-37, IEEE, 2023. [doi]

Abstract

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