2 Annealing and Its Effect on Ultrathin HfON Gate Insulator Formation

Dae-Hee Han, Shun'ichiro Ohmi. 2 Annealing and Its Effect on Ultrathin HfON Gate Insulator Formation. IEICE Transactions, 96-C(5):669-673, 2013. [doi]

Abstract

Abstract is missing.