Youngshin Han, Dongsik Park, Sangwon Chae, Chilgee Lee. Full Fabrication Simulation of 300mm Wafer Focused on AMHS (Automated Material Handling Systems). In Doo-Kwon Baik, editor, Systems Modeling and Simulation: Theory and Applications, Third Asian Simulation Conference, AsiaSim 2004, Jeju Island, Korea, October 4-6, 2004, Revised Selected Papers. Volume 3398 of Lecture Notes in Computer Science, pages 514-520, Springer, 2004. [doi]
Abstract is missing.