Ongoing Evolution of DRAM Scaling via Third Dimension -Vertically Stacked DRAM -

Jung-Won Han, S. H. Park, M. Y. Jeong, K.-S. Lee, K. N. Kim, H.-J. Kim, J. C. Shin, S. M. Park, S. H. Shin, S. W. Park, K.-S. Lee, J. H. Lee, S. H. Kim, B. C. Kim, M. H. Jung, I. Y. Yoon, H. Kim, S. U. Jang, K. J. Park, Y. K. Kim, I. G. Kim, J. H. Oh, S. Y. Han, B. S. Kim, B. J. Kuh, J. M. Park. Ongoing Evolution of DRAM Scaling via Third Dimension -Vertically Stacked DRAM -. In 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Kyoto, Japan, June 11-16, 2023. pages 1-2, IEEE, 2023. [doi]

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