Overhang Saddle Fin Sidewall Structure for Highly Reliable DRAM Operation

Jin-Woo Han, Minki Suh, Gyeongyeop Lee, Jungsik Kim. Overhang Saddle Fin Sidewall Structure for Highly Reliable DRAM Operation. IEEE Access, 11:82738-82743, 2023. [doi]

Abstract

Abstract is missing.