Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature - researchr publication authors

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Dedong Han, Yi Wang, Shengdong Zhang, Lei Sun, Ruqi Han, Satoru Matsumoto, Yuji Ino. Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature. Science in China Series F: Information Sciences, 55(4):951-955, 2012. [doi]

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