Dedong Han, Yi Wang, Shengdong Zhang, Lei Sun, Ruqi Han, Satoru Matsumoto, Yuji Ino. Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature. Science in China Series F: Information Sciences, 55(4):951-955, 2012. [doi]
@article{HanWZSHMI12,
title = {Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature},
author = {Dedong Han and Yi Wang and Shengdong Zhang and Lei Sun and Ruqi Han and Satoru Matsumoto and Yuji Ino},
year = {2012},
doi = {10.1007/s11432-011-4347-z},
url = {http://dx.doi.org/10.1007/s11432-011-4347-z},
researchr = {https://researchr.org/publication/HanWZSHMI12},
cites = {0},
citedby = {0},
journal = {Science in China Series F: Information Sciences},
volume = {55},
number = {4},
pages = {951-955},
}