Xiangguang Han, Libo Zhao, Xuejiao Li, Ping Yang, Hongyan Wang, Zhuangde Jiang. A High Accuracy Resonant Pressure Sensor with Lateral Driven and Piezoresistive Detection. In 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019. pages 167-171, IEEE, 2019. [doi]
Abstract is missing.