Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
Lloyd R. Harriott. Limits of lithography. Proceedings of the IEEE, 89(3):366-374, 2001. [doi]
No references recorded for this publication.
No citations of this publication recorded.