Miki Hashimoto, Yusuke Ide, Masayoshi Aritsugi. Anomaly detection for sensor data of semiconductor manufacturing equipment using a GAN. In Jaroslaw Watróbski, Wojciech Salabun, Carlos Toro 0001, Cecilia Zanni-Merk, Robert J. Howlett, Lakhmi C. Jain, editors, Knowledge-Based and Intelligent Information & Engineering Systems: Proceedings of the 25th International Conference KES-2021, Virtual Event / Szczecin, Poland, 8-10 September 2021. Volume 192 of Procedia Computer Science, pages 873-882, Elsevier, 2021. [doi]
Abstract is missing.