Integration of combinatorial evaluation and MEMS technology for material search

Seiichi Hata. Integration of combinatorial evaluation and MEMS technology for material search. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2012, Nagoya, Aichi, Japan, November 4-7, 2012. pages 512, IEEE, 2012. [doi]

Abstract

Abstract is missing.