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Angle-resolved photoelectron spectroscopy on gate insulators

T. Hattori, H. Nohira, S. Shinagawa, M. Hori, M. Kase, T. Maruizumi. Angle-resolved photoelectron spectroscopy on gate insulators. Microelectronics Reliability, 47(1):20-26, 2007. [doi]

Authors

T. Hattori

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H. Nohira

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S. Shinagawa

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M. Hori

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M. Kase

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T. Maruizumi

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