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Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning

Michael Haub, Martin Bogner, Thomas Guenther, André Zimmermann, Hermann Sandmaier. Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning. Sensors, 21(11):3795, 2021. [doi]

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