Masanori Hayase, Naoki Mizukoshi, Masayuki Nagao. Copper deep via superfilling by selective accelerator deactivation. In Mitsumasa Koyanagi, Morihiro Kada, editors, 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31 - February 2, 2012. pages 1-4, IEEE, 2011. [doi]
@inproceedings{HayaseMN11,
title = {Copper deep via superfilling by selective accelerator deactivation},
author = {Masanori Hayase and Naoki Mizukoshi and Masayuki Nagao},
year = {2011},
doi = {10.1109/3DIC.2012.6262982},
url = {http://dx.doi.org/10.1109/3DIC.2012.6262982},
researchr = {https://researchr.org/publication/HayaseMN11},
cites = {0},
citedby = {0},
pages = {1-4},
booktitle = {2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31 - February 2, 2012},
editor = {Mitsumasa Koyanagi and Morihiro Kada},
publisher = {IEEE},
isbn = {978-1-4673-2189-1},
}