Copper deep via superfilling by selective accelerator deactivation

Masanori Hayase, Naoki Mizukoshi, Masayuki Nagao. Copper deep via superfilling by selective accelerator deactivation. In Mitsumasa Koyanagi, Morihiro Kada, editors, 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31 - February 2, 2012. pages 1-4, IEEE, 2011. [doi]

Abstract

Abstract is missing.