Lithography Hotspot Detection with FFT-based Feature Extraction and Imbalanced Learning Rate

Xu He, Yu Deng, Shizhe Zhou, Rui Li, Yao Wang 0002, Yang Guo. Lithography Hotspot Detection with FFT-based Feature Extraction and Imbalanced Learning Rate. ACM Trans. Design Autom. Electr. Syst., 25(2), 2020. [doi]

Abstract

Abstract is missing.