Yunbo He, Xiquan Mai, Chengqiang Cui, Jian Gao 0002, Zhijun Yang, Kai Zhang, Xun Chen, Yun Chen 0002, Hui Tang 0003. Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control. IEEE Access, 7:47143-47153, 2019. [doi]
Abstract is missing.