A Novel Flexure Piezomotor With Minimized Backward and Nonlinear Motion Effect

Sifeng He, Hui Tang 0003, Zhongyuan Zhu, Peiyuan Zhang, Ying Xu 0001, Xin Chen 0005. A Novel Flexure Piezomotor With Minimized Backward and Nonlinear Motion Effect. IEEE Transactions on Industrial Electronics, 69(1):652-662, 2022. [doi]

Abstract

Abstract is missing.