A direct-drive SCARA robot for wafer&ceramic-substrate handling based on visual servoing

Yunbo He, Chang Zhang, Wentao Ye, Zuoxiong He, Xin Chen, Jian Gao, Kai Zhang, Zhijun Yang, Xun Chen, Yun Chen, Hui Tang. A direct-drive SCARA robot for wafer&ceramic-substrate handling based on visual servoing. In 2017 IEEE International Conference on Cybernetics and Intelligent Systems (CIS) and IEEE Conference on Robotics, Automation and Mechatronics (RAM), Ningbo, China, November 19-21, 2017. pages 428-433, IEEE, 2017. [doi]

Abstract

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