Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity

Jiangbo He, Wu Zhou 0003, Huijun Yu, Xiao-Ping He, Peng Peng. Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity. Sensors, 18(2):643, 2018. [doi]

Authors

Jiangbo He

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Wu Zhou 0003

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Huijun Yu

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Xiao-Ping He

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Peng Peng

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