Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity

Jiangbo He, Wu Zhou 0003, Huijun Yu, Xiao-Ping He, Peng Peng. Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity. Sensors, 18(2):643, 2018. [doi]

Abstract

Abstract is missing.