An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners

Marcel Heertjes, Sebastiaan van den Eijnden, Bardia Sharif. An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners. In IEEE International Conference on Mechatronics, ICM 2023, Loughborough, United Kingdom, March 15-17, 2023. pages 1-8, IEEE, 2023. [doi]

Abstract

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