Quasi-3D method: Time-efficient TCAD and mixed-mode simulations on finFET technologies

Geert Hellings, Shih-Hung Chen, Dimitri Linten, Mirko Scholz, Guido Groeseneken. Quasi-3D method: Time-efficient TCAD and mixed-mode simulations on finFET technologies. In Proceedings of the IEEE 2013 Custom Integrated Circuits Conference, San Jose, CA, USA, September 22-25, 2013. pages 1-4, IEEE, 2013. [doi]

Abstract

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