Characterising the surface roughness of AFM grown SiO::2:: on Si

D. Hill, X. Blasco, M. Porti, M. Nafría, X. Aymerich. Characterising the surface roughness of AFM grown SiO::2:: on Si. Microelectronics Reliability, 41(7):1077-1079, 2001. [doi]

@article{HillBPNA01,
  title = {Characterising the surface roughness of AFM grown SiO::2:: on Si},
  author = {D. Hill and X. Blasco and M. Porti and M. Nafría and X. Aymerich},
  year = {2001},
  doi = {10.1016/S0026-2714(01)00078-6},
  url = {http://dx.doi.org/10.1016/S0026-2714(01)00078-6},
  researchr = {https://researchr.org/publication/HillBPNA01},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {41},
  number = {7},
  pages = {1077-1079},
}