Feasibility analysis of a novel production method for monolithic integrated MEMS with nanogaps

D. Hohnloser, D. Shuklin, C. Schmidt, M. Kreitmaier, M. Blasim, Amelie Hagelauer, Robert Weigel. Feasibility analysis of a novel production method for monolithic integrated MEMS with nanogaps. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

Abstract

Abstract is missing.