External Links

Cite Key

Statistics

  • References: 0
  • Cited by: 0
  • Reviews: 0
  • Bibliographies: 0

PDF

Researchr

Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.

Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.

Modeling, Simulation and Supervisory Control of Semiconductor Manufacturing Cluster Tools with an Equipment Front-End Module

Cheolhui Hong, Tae-Eog Lee. Modeling, Simulation and Supervisory Control of Semiconductor Manufacturing Cluster Tools with an Equipment Front-End Module. In 16th IEEE International Conference on Automation Science and Engineering, CASE 2020, Hong Kong, August 20-21, 2020. pages 703-709, IEEE, 2020. [doi]

Authors

Cheolhui Hong

This author has not been identified. Look up 'Cheolhui Hong' in Google

Tae-Eog Lee

This author has not been identified. Look up 'Tae-Eog Lee' in Google
runs on