Application and Prospect of MEMS Technology to Geophysics

Heting Hong, Lvchao Ni, Hongchun Sun. Application and Prospect of MEMS Technology to Geophysics. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1863-1866, IEEE, 2021. [doi]

Abstract

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