A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range

Yifan Hong, Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao. A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range. Sensors, 22(8):3010, 2022. [doi]

Abstract

Abstract is missing.