Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range

Yifan Hong, Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Hiroki Shimizu, Wei Gao. Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range. Sensors, 22(23):9563, 2022. [doi]

Abstract

Abstract is missing.