Peizhen Hong, Zhiguo Zhao, Jun Luo 0002, Zhiliang Xia, Xiaojing Su, Libin Zhang, Chunlong Li, Zongliang Huo. An Improved Dimensional Measurement Method of Staircase Patterns With Higher Precision in 3D NAND. IEEE Access, 8:140054-140061, 2020. [doi]
Abstract is missing.