Sean Hooten, Mudit Jain, Thomas Van Vaerenbergh, Peng Sun, Quentin Wilmart, M. Ashkan Seyedi, Zhihong Huang, Marco Fiorentino, Raymond G. Beausoleil. Inverse-Designed Dual Layer c-Si/SiN Vertical Grating Couplers Tested on 300mm Wafers. In 2022 27th OptoElectronics and Communications Conference (OECC) and 2022 International Conference on Photonics in Switching and Computing (PSC), Toyama, Japan, July 3-6, 2022. pages 1-4, IEEE, 2022. [doi]
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