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Analysis of primary-on-slider type piezoelectric actuator and the application to two-degree-of-motion freedom plane actuator

Nobukazu Hoshi, Atsuo Kawamura. Analysis of primary-on-slider type piezoelectric actuator and the application to two-degree-of-motion freedom plane actuator. IEEE Transactions on Industrial Electronics, 43(1):192-199, 1996. [doi]

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