High-Precision Incremental Capacitive Angle Encoder Developed by Micro Fabrication Technology

Bo Hou, Bin Zhou, Luying Yi, Bowen Xing, Xiang Li 0035, Qi Wei 0001, Rong Zhang 0005. High-Precision Incremental Capacitive Angle Encoder Developed by Micro Fabrication Technology. IEEE Transactions on Industrial Electronics, 68(7):6318-6327, 2021. [doi]

Abstract

Abstract is missing.