Modeling of heat transfer for laser-assisted direct nano imprint processing

Fei-Bin Hsiao, Di-Bao Wang, Chun-Ping Jen, Hui-ju Hsu, Cheng-Hsin Chuang, Yung-Chun Lee, Chuan-Pu Liu. Modeling of heat transfer for laser-assisted direct nano imprint processing. In IEEE International Conference on Robotics and Biomimetics, ROBIO 2005, Shatin, N.T. China, 5-9 July 2005. pages 747-751, IEEE, 2005. [doi]

Abstract

Abstract is missing.