Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors

Chen-Hsuan Hsieh, Ching-Liang Dai, Ming-Zhi Yang. Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors. Sensors, 13(11):14728-14739, 2013. [doi]

Abstract

Abstract is missing.