Model construction and parameter effect for TFT-LCD process based on yield analysis by using ANNs and stepwise regression

Kun-Lin Hsieh, Yen-Sheng Lu. Model construction and parameter effect for TFT-LCD process based on yield analysis by using ANNs and stepwise regression. Expert Syst. Appl., 34(1):717-724, 2008. [doi]

Abstract

Abstract is missing.