Yi-Ta Hsieh, Yung-Chun Lee. Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 40-44, IEEE, 2012. [doi]
@inproceedings{HsiehL12-0,
title = {Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes},
author = {Yi-Ta Hsieh and Yung-Chun Lee},
year = {2012},
doi = {10.1109/NEMS.2012.6196718},
url = {http://dx.doi.org/10.1109/NEMS.2012.6196718},
researchr = {https://researchr.org/publication/HsiehL12-0},
cites = {0},
citedby = {0},
pages = {40-44},
booktitle = {7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012},
publisher = {IEEE},
isbn = {978-1-4673-1122-9},
}