Hung-Chih Hsieh, Meng-Rong Wu, Xiang-Ting Huang. Designing Highly Precise Overlay Targets for Asymmetric Sidewall Structures Using Quasi-Periodic Line Widths and Finite-Difference Time-Domain Simulation. Sensors, 23(9):4482, 2023. [doi]
@article{HsiehWH23-0,
title = {Designing Highly Precise Overlay Targets for Asymmetric Sidewall Structures Using Quasi-Periodic Line Widths and Finite-Difference Time-Domain Simulation},
author = {Hung-Chih Hsieh and Meng-Rong Wu and Xiang-Ting Huang},
year = {2023},
doi = {10.3390/s23094482},
url = {https://doi.org/10.3390/s23094482},
researchr = {https://researchr.org/publication/HsiehWH23-0},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {23},
number = {9},
pages = {4482},
}