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Designing Highly Precise Overlay Targets for Asymmetric Sidewall Structures Using Quasi-Periodic Line Widths and Finite-Difference Time-Domain Simulation

Hung-Chih Hsieh, Meng-Rong Wu, Xiang-Ting Huang. Designing Highly Precise Overlay Targets for Asymmetric Sidewall Structures Using Quasi-Periodic Line Widths and Finite-Difference Time-Domain Simulation. Sensors, 23(9):4482, 2023. [doi]

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