ChingHung Hsu, Gui Chen, Yen-Heng Lin, Mark Ming-Cheng Cheng. Anodic bonding using Gorilla Glasses. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 566-569, IEEE, 2017. [doi]
Abstract is missing.