Chih-Hsiang Hsu, Shao-Yun Fang. Stitch-Aware Routing Considering Smart Boundary for Multiple E-Beam Lithography. In 2020 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2020, Hsinchu, Taiwan, August 10-13, 2020. pages 1-4, IEEE, 2020. [doi]
@inproceedings{HsuF20, title = {Stitch-Aware Routing Considering Smart Boundary for Multiple E-Beam Lithography}, author = {Chih-Hsiang Hsu and Shao-Yun Fang}, year = {2020}, doi = {10.1109/VLSI-DAT49148.2020.9196298}, url = {https://doi.org/10.1109/VLSI-DAT49148.2020.9196298}, researchr = {https://researchr.org/publication/HsuF20}, cites = {0}, citedby = {0}, pages = {1-4}, booktitle = {2020 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2020, Hsinchu, Taiwan, August 10-13, 2020}, publisher = {IEEE}, isbn = {978-1-7281-6083-2}, }