Chih-Hsiang Hsu, Shao-Yun Fang. Stitch-Aware Routing Considering Smart Boundary for Multiple E-Beam Lithography. In 2020 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2020, Hsinchu, Taiwan, August 10-13, 2020. pages 1-4, IEEE, 2020. [doi]
Abstract is missing.