Songqi Hu, Hongjuan Cui, Kun He, Zhanqiang Hou, Peng Chen, Dingbang Xiao, Xuezhong Wu. A method of structural trimming to reduce mode coupling error for micro-gyroscopes. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 805-808, IEEE, 2013. [doi]
Abstract is missing.