Jia Hu, Shuwei He, Yiming Zhang, Jing Chen. In-situ measurement of ion angular distribution in bulk titanium DRIE for modeling the etch profile. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 332-335, IEEE, 2013. [doi]
@inproceedings{HuHZC13,
title = {In-situ measurement of ion angular distribution in bulk titanium DRIE for modeling the etch profile},
author = {Jia Hu and Shuwei He and Yiming Zhang and Jing Chen},
year = {2013},
doi = {10.1109/NEMS.2013.6559744},
url = {http://dx.doi.org/10.1109/NEMS.2013.6559744},
researchr = {https://researchr.org/publication/HuHZC13},
cites = {0},
citedby = {0},
pages = {332-335},
booktitle = {8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013},
publisher = {IEEE},
}