Jia Hu, Shuwei He, Yiming Zhang, Jing Chen. In-situ measurement of ion angular distribution in bulk titanium DRIE for modeling the etch profile. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 332-335, IEEE, 2013. [doi]
Abstract is missing.