Multiple Shear-Shift Absolute Calibration of Reference Surface for White-Light Interferometers

Zubo Hu, Shuai Xue, Yunfeng Mao, Xibo Gao, Antong Huang. Multiple Shear-Shift Absolute Calibration of Reference Surface for White-Light Interferometers. IEEE T. Instrumentation and Measurement, 74:1-10, 2025. [doi]

Abstract

Abstract is missing.